PROCESS PROGRESS MANAGEMENT DEVICE AND ITS METHOD

摘要

PROBLEM TO BE SOLVED: To obtain process progress management device and its method capable of automatically and continuously executing process progress management even when communication with a processing progress management computer is disabled or when the battery in an ID card runs out and automatically returning to normal process progress management when the system is restored from the failure. SOLUTION: When a wafer cassette 2 is loaded, a loading sensor 4 senses the cassette 2 and a processor controller 7 sends a signal to a processing progress computer 8 through a device controller 9 to obtain information necessary for processing. When a switch 6 is depressed, an I/D card reading/writing controller 10 reads out information from an ID card 3 through an electro-optical communication converter 5 and sends the read information to the computer 8 through the controller 9, a processing start signal is sent to the controller 7 and processing is executed by a processor 1. When communication with a processing progress management computer system is disabled or when the battery in the ID card runs out, the controller 9 executed process management in accordance with an internal set program.