发明名称 SLICING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a slicing method, capable of solving clogging of a wheel and preventing reduction in the processing quality of chipping, etc. SOLUTION: In a method for slicing a processing matter 1 by an outer peripheral blade wheel 6, the processing matter 1 is mounted on a substrate 2 and the both are held in parallelism, while the both are fixed via a low fusing point material layer 3 therebetween, and the processing matter 1 is sliced so that the leading end of the outer peripheral blade wheel 6 is positioned in a middle part of the low meeting point material layer 3. The sliced substrate 2 and a processing matter 1a are heated, and the low fusing point material layer 3 therebetween is meeted to isolate the processing matter 1a from the substrate 2.</p>
申请公布号 JP2000315664(A) 申请公布日期 2000.11.14
申请号 JP19990123369 申请日期 1999.04.30
申请人 MURATA MFG CO LTD 发明人 OKAJIMA KENICHI;INAO TAKESHI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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