TEMPERATURE CONTROLLED EXHAUST AND COLD TRAP INTEGRATED ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a temperature controlled exhaust system by containing a conduit for exhaust gas, which has at least one fitted heater and a temperature sensor, and a cold trap connected to the conduit. SOLUTION: An exhaust assembly 100 is formed of multiheater design and incorporates six outer heaters 155 in total for heating the various parts of the exhaust assembly 100. The respective heaters 155 have associated temperature sensors 197 realizing independent closed loop feed back by a controller. A single stage multiloop coil cold trap 150 is incorporated as the integrated component of the exhaust assembly 100. The cold trap 150 has a single baffle plate 159 arranged near the entrance of the trap, and a multiloop cooling coil 156 conducting cooling water at the temperature of about 20 to 25 deg.C. A condensed material from exhaust gas is adsorbed to the surface of the baffle plate 159 and the coil 156.