发明名称 PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent a foreign matter from growing in a needle tip, by sliding inclinedly a probe support at a prescribed angle when the tip of a probe receives overdrive from a measured electrode, and by advancing the probe and then retreating it thereby at the time of the overdrive. SOLUTION: A Z-movable piece 50 of a probe block 46 is slidable diagonally toward the upper right of the figure, with respect to a Z-base 48. That is, a Z-slide 52 of the piece 50 is diagonally elevatable along a Z-guide 54 of the base 48. The Z-movable piece 50 is pushed downwards by two compression coil springs 40, and a head part of an adjusting screw 42 serves as a stopper for preventing falling of the piece 50. When a tip part 64 of a probe needle 18 receives overdrive from a measured electrode, the tip part 64 of the probe needle 18 advances slightly, and is retreated thereafter by diagonal elevation of the Z-movable piece 50 toward the upper right.
申请公布号 JP2000314746(A) 申请公布日期 2000.11.14
申请号 JP19990125212 申请日期 1999.04.30
申请人 MICRONICS JAPAN CO LTD 发明人 MIURA KAZUYOSHI;TOGAWA YUZURU;FUKUSHI TOSHIO;KUGA TOMOAKI
分类号 G01R1/073;(IPC1-7):G01R1/073 主分类号 G01R1/073
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