发明名称 Gun-shaped tweezer having a non-rotatable head/body connection for adsorbing a semiconductor wafer
摘要 A tweezer for adsorbing a semiconductor device allows easy and safe handling of the wafer by preventing rotation of the tweezer due to the weight of a wafer adsorbed off-center, and the breakage of the wafer caused thereby. The tweezer has a gun-shaped body, including a handle having a first vacuum line, and a barrel connected to the handle, the first vacuum line extending through the barrel. The first vacuum line is opened and closed by a trigger and shutter. A head is non-rotatably attached to the barrel, the head having a second vacuum line connected to the first vacuum line for adsorbing the wafer by the vacuum supplied inside the second vacuum line.
申请公布号 US6145900(A) 申请公布日期 2000.11.14
申请号 US19990301540 申请日期 1999.04.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JUNG, YUI-KUN
分类号 H01L21/68;B25B11/00;B25J15/06;F16L21/03;H01L21/677;H01L21/683;(IPC1-7):B25J15/06 主分类号 H01L21/68
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