| 摘要 |
PROBLEM TO BE SOLVED: To obtain a ceramic material or member consisting substantially of MgO, Al2O3 and ZrO2 and/or Y2O3 with each specified compositional ratio MgO/Al2O3 and ZrO2 and/or Y2O3 content, having excellent mechanical properties and high corrosionproofness against corrosive gases such as halogen-based ones and plasma. SOLUTION: This corrosionproof ceramic material or member consists of such a ceramic as to be composed substantially of MgO, Al2O3 and ZrO2 and/or Y2O3, be 0.67-2.33 in the compositional weight ratio MgO/Al2O3 and contain a total of 1-10 wt.% of ZrO2 and/or Y2O3. It is preferable that this ceramic material or member is designed to be <=3 wt.% in impurity content and <=1% in porosity so as to enable high-purity members to be treated and also prevent the properties of the surface of this material or member from deterioration. This ceramic material or member, owing to its constitution of MgO+MgAl2O4 and incorporation of each appropriate amount of ZrO2 and/or Y2O3, attains high corrosionproofness and excellent mechanical properties, and can be used in atmospheres of corrosive gases or corrosive gas plasma, in particular of halogen-based corrosive gases represented by fluorine-based ones or plasma thereof. |
