| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently clean exhaust gas for emission and to miniaturize a device for sufficient adsorption of an ethylene oxide gas by connecting to the gas exhaust port of a sterilizing vessel an exhaust gas treatment vessel for treating the ethylene oxide gas, and providing a reflow path through which the exhaust gas from the exhaust gas treatment vessel is made to flow back into the sterilizing vessel. SOLUTION: In an ethylene oxide gas sterilizer, the operations of filling a sterilizing vessel 1 which an ethylene gas to perform sterilization, then exhausting the gas in the sterilizing vessel 1, and introducing air therein to replace gas in the sterilizing vessel 1 are repeated plural times. An exhaust gas treatment vessel 4 for processing the ethylene oxide gas is connected to the sterilizing vessel 1, and a reflow passage 10 through which the exhaust gas is made to flow back into the sterilizing vessel 1 from the exhaust gas treatment vessel 4 is provided. |
