发明名称 |
Device and process for the liquid treatment of disk-shaped objects |
摘要 |
The arrangement has a device for holding the object, a gas feed device (5,6) for at least partial gas flushing of the surface of the object facing the device and a peripheral gas guide (4) that guides the majority of the flushing gas in the edge region of the object away from the object. The gas guide is in the form of a ring. An Independent claim is also included for a method of liquid treatment of disc-shaped objects. |
申请公布号 |
EP1052682(A1) |
申请公布日期 |
2000.11.15 |
申请号 |
EP19990108319 |
申请日期 |
1999.04.28 |
申请人 |
SEZ SEMICONDUCTOR-EQUIPMENT |
发明人 |
LANGEN, KURT |
分类号 |
B08B5/00;B08B3/02;B08B3/04;B08B7/04;H01L21/00;H01L21/30;H01L21/304;H01L21/306 |
主分类号 |
B08B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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