| 摘要 |
PROBLEM TO BE SOLVED: To effectively prevent generation of vibration in a nozzle or the like, while making buffer function exhibit finely in vacuum chucking and mounting of components. SOLUTION: A nozzle shaft 21 is provided on a head unit and is connected to Z-axis and R-axis drive mechanisms. At the lower end of the nozzle shaft 21, a holder 40 is set relatively movable vertically, to which a nozzle-assembly block 30 having a plurality of nozzles is held turnably. An air chamber 70 is provided between the shaft 21 and the holder 40. While the vertical movement of the holder 40 against the shaft 21 is obstructed by supplying air to the pressure chamber 70, vertical movement of the holder 40 with respect to the shaft 21 is allowed by stopping the air supply. The air supply is controlled so as to make the air supply to the pressure chamber 70 stop during lowering of the nozzle for vacuum chucking and mounting of a component, and the air supply to the pressure chamber 70 is recovered after vacuum chucking and mounting of the component. |
