| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator device and its operating method in which the driving force of a micro-mirror is not attenuated by the viscosity of air and also which does not adhere to a supporting body. SOLUTION: A through-hole 8 is provided on the surface of a substrate 2 opposite to a vibrator 5 for supporting a mirror 4, thereby communicating a space 25 with the outside. In addition, the compressed air inside the space 25 by the vibration of the vibrator 5 is controlled by installing a mesh electrode and a butterfly valve that actuate relative to the operation of the vibrator 5, while the adhesion of the vibrator 5 is prevented by introducing an air stream from the through-hole 8 into the space 25. |
