| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject sintered compact with high corrosion resistance, suitable as a member for plasma treatment apparatuses capable of suppressing particle generation. SOLUTION: This high-density magnesium oxide-based sintered compact is such one as to consist mainly of magnesium oxide, contain 0.1-20 wt.%, on an oxide basis, of at least one kind of rare earth element selected from Yb, Er and Lu, contain <=100 ppm, on a metal basis, of a total of metallic elements other than magnesium and the rare earth element(s), be <=10 μm in the mean size of each of the magnesium oxide crystal grains, and be >=99% in relative density. Furthermore, in this sintered compact, there exists the rare earth metal(s) oxide crystal phase in the grain boundary phase. |
