| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to transfer vacuum treater according to the need. SOLUTION: A vacuum-treating system 100 provided with a plurality of vacuum treaters to a material-to-be-treated carrying system is provided with a plurality of installation spaces 120 for installing the vacuum treaters 110, rails 130 for guiding the treaters 110 to the arbitrary installation spaces to position the treaters 110 at the arbitrary installation spaces, power supplying parts 140 which are provided in the state corresponding to the spaces 120 and are standarized so that the treaters 110 can be operated even though the treaters 110 are installed in any of the spaces 120, and an AGV(Automatic Guided Vehicle) 150 for carrying a material to be treated to each vacuum treater 110 installed in the spaces 120. It is possible to transfer the treaters 110 installed once to the other installation place according to the need or to exchange the treaters 110 installed once for the other treater. For this, an increase in the efficiency of the system due to the change of arrangement and the expansion of the system due to an increase in the treaters can be easily contrived. |
