| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the nonuniformity of a transferred video caused by forming a phase shift layer from occurring by forming a phase shift layer between light-shielding films adjacent to each other and forming a second light-shielding film between light-shielding films where no phase shift layer is formed. SOLUTION: A plurality of first light-shielding films 12 are formed on the back surface of a quartz glass substrate 11. Then a phase shift layer 14 is formed between a pair of first light-shielding films adjacent to each other in such a manner that the layer 14 overlaps the pair of light-shielding films 12. Then plural second light-shielding films 15 are formed between first light shielding films 12 where the phase shift layer 14 is not formed. The thickness d of the second light-shielding film 15 is determined by d=&lambda /2n(n'+1), wherein &lambda is the wavelength of light, n is the refractive index of the phase shift layer 14 and n' is the refractive index of the second light-shielding film 15. Thereby, a nonuniform state in a transferred image caused by forming the phase shift layer can be prevented.</p> |
