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发明名称
摘要
申请公布号
JP3109131(B2)
申请公布日期
2000.11.13
申请号
JP19910133559
申请日期
1991.05.09
申请人
发明人
分类号
G01R1/073;G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
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代理人
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