| 摘要 |
<p>Volatile liquid precursors are provided for the formation of alkali metal-containing materials. The liquid precursors comprise alkali metal amides. For example, a volatile liquid compound was formed by reacting butyl lithium with bis(ethyldimethylsilyl)amine. Films containing alkali metals are deposited from vapors of the precursor liquids and, optionally, oxygen or other sources of oxygen. This process may be used to deposit lithium niobate films having non-linear optical properties. The liquid precursors may also be used for spray coating, spin coating and sol-gel deposition of materials containing alkali metals.</p> |
