Producing uniform overall raster structure on workpiece, involves using displacement between adjacent sectional structures corresponding to width of sub-field or its integral multiple

摘要

The method involves repeatedly applying partial raster structures with a spatial displacement using a tool taking into account the displacement error between demanded and actual positions. The partial raster structure is defined as a sectional raster structure in a sub-field for driving a workpiece holder, whereby the displacement (ST) between adjacent sectional structures corresponding at least to the width of the sub-field or an integral multiple. An Independent claim is also included for an application of the method to the manufacture of uniform overall raster structure.