Device for processing workpieces made of highly pure metal comprises several vacuum processing stations for desorption, coating and homogenizing the workpieces

摘要

Device for processing workpieces made of highly pure metal comprises several vacuum processing stations for desorption, coating and homogenizing the workpieces. Each of the vacuum stations are connected to three ultra-high vacuum stations and then arranged in a pure chamber cell. The ultra-high vacuum stations are charged with metal cores or metal cylinders and heating elements and directed to receive workpieces.