发明名称 A METHOD FOR MAKING FLEXIBLE CIRCUITS
摘要 A process for making flexible circuits wherein the etching of a polymeric fi lm is accomplished by dissolving portions thereof with concentrated aqueous bas e using a UV-curable 100 % active liquid photoresist as a mask, comprising the steps of laminating the resist on a polymeric film, exposing a pattern into the resist, developing the resist with a dilute aqueous solution until desir ed image is obtained, etching portions of the polymeric film not covered by the crosslinked resist with a concentrated base at a temperature of from 50 ~C t o 120 ~C, and then stripping the resist off the polymeric film.
申请公布号 CA2369658(A1) 申请公布日期 2000.11.09
申请号 CA19992369658 申请日期 1999.08.17
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 LU, DAVID D.
分类号 G03F7/40;H01L21/311;H05K3/00;H05K3/06;(IPC1-7):H05K3/00 主分类号 G03F7/40
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