| 摘要 |
<p>A universal SMIF pod interface and wafer cassette transfer apparatus (100) may be configured either as an indexer or as a load port opener. The apparatus includes both a port plate (102) having a central opening (175), and a port door (104) fitting within and sealing the central opening when no pod is present. The apparatus further includes a linear drive screw (120), a motor (114), and transmission (118, 124, 122) for rotating the linear drive screw. A carriage (128) is translatable vertically by means of the linear drive screw. As an indexer, the port plate mounts to the carriage so that the port plate is movable vertically, above the stationary port door. As a load port opener, the port door is mounted to the carriage so that the port door is movable vertically, below the stationary port plate.</p> |
