发明名称 Polishing slurry
摘要 <p>The invention provides a mixture for polishing surfaces. The mixture includes polishing particles having an average size of less than 10 mu m and water. It also includes an accelerator for chemically attacking a surface and a starch for reducing vibration of polishing machines.</p>
申请公布号 EP1050568(A1) 申请公布日期 2000.11.08
申请号 EP20000109322 申请日期 2000.04.30
申请人 PRAXAIR S.T. TECHNOLOGY, INC. 发明人 KNAPP, JAMES KENT;KWOK, DORIS
分类号 C09K3/14;B24B37/00;C09K13/04;(IPC1-7):C09K3/14;C09G1/02;G11B5/84 主分类号 C09K3/14
代理机构 代理人
主权项
地址