Functional element for electric, electronic or optical device and method for manufacturing the same

摘要

A functional element for an electric, electronic or optical device comprising a substrate and a plurality of metal oxide needles standing on the upper surface thereof, wherein the metal oxide needles extend upward from the upper surface of the substrate with their central axes being arranged substantially parallel one another, have a specific weighed average diameter in terms of a circle and a specific weighed average aspect ratio, and are present in a specific density on the upper surface of the substrate. The element is manufactured by a method comprising vaporizing a metal compound capable of forming a metal oxide through reacting with a substance having an ability to form an oxide and blowing the resultant gas of the metal compound onto the surface of the substrate which is placed in a reaction region wherein a substance forming an oxide is present and is heated to a temperature higher than that of the gas of the metal compound.