| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate processing device, which assures sufficient vessels for housing a substrate without increasing the size of the device. SOLUTION: An FOUP rotary housing shelf 25 and its three-stage shelf 27 are rotatable about a revolution mechanism body 26. Two FOUPs 13, oriented in the same direction on the same straight line, are housed respectively, on each of three-stage shelf 27, on the front and rear of the revolving mechanism body 26. By an FOUP carrier 22, the FOUPs 13 are carried into the three-stage shelves 27 of the FOUP rotary housing shelf 25 so that they are on one straight line, while being oriented in the same direction with the FOUPs 13 oriented in the same direction on the same straight line carried out of the FOUP rotary housing shelf 25.</p> |
