| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an effect of adhering substances and correctly observe a medium surface by applying a force to between a probe tip and a surface for cleaning thereby removing deposit of the probe tip, and observing an interaction acting between the probe and medium. SOLUTION: A probe consisting of a probe 101 and a supporting elastic body scans a medium and detects an interaction between the probe 101 and the medium. In other words, a relative position of the medium and a tip of the probe 101 is controlled to move in a horizontal and a vertical directions of the medium. A position of the tip of the probe 101 is moved to a position where to detect and the medium is scanned. The interaction is directly observed and detected from a current flowing between the probe 101 and medium, or the like. In this case, the probe 101 is brought into contact with a surface 103 for cleaning and pressed in an arrow direction, so that the deposit 102 of the probe 101 is moved to the surface 103 for cleaning and removed. A pressing force is applied by moving a root of the elastic body in a direction for the probe 101 to press the surface 103 for cleaning. An effect of the deposit 102 is eliminated and a correct observation image can be obtained.
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