| 摘要 |
PROBLEM TO BE SOLVED: To provide a robot that can generally transfer workpieces such as silicon wafers at high speed, acceleration and deceleration. SOLUTION: A robot wrist related to a robot arm 42 is given in order to clamp a workpiece mechanically in a workpiece handling member 60 fixed to the robot arm 42. A workpiece clamp, holding the workpiece, selectively provides force enough to prevent slippage of and damage to the workpiece while the handling member 60 makes quick turning motion and rectilinear motion. In one mode, the clamp for securing a silicon wafer uses two clamp fingers coupled to a single flexible member, and holds the wafer in place while minimizing particulate generation and wafer damage. The clamp is designed to clamp the wafer constantly except when the workpiece handling member 60 is fully extended to transfer or pick up the wafer. |
