,申请号JP19980506425-传众专利搜索

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发明名称
摘要
申请公布号	JP2000514872(A)	申请公布日期	2000.11.07
申请号	JP19980506425	申请日期	1997.07.15
申请人		发明人
分类号	C23C14/34;C23C;C23C14/35;H01J;H01J37/34;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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