| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable ink-jet printer head having a good pressuring energy efficiency, capable of ejecting an ink stably over a long time, with a good pressure storage partition wall having a good adhesion property with respect to a substrate. SOLUTION: A photosensitive polyimide is coated on the upper entire surface of a substrate 20 as a base layer 41 so as to be closely contacted on an inert metal electrode film on the substrate 20. A partition wall 31 is patterned on the base layer 41 so as to form an ink seal wall and a heat generating part section wall. After formation of a common ink supply groove and an ink supply hole, an orifice plate 33 is laminated on the partition wall 31. A metal film is patterned thereon so as to form a metal film mask 42. The orifice plate 33 is dry-etched by a helicon wave, or the like so as to form an ink jetting nozzle 35 along the metal film mask 42. By continuing the etching operation so as to drill the base layer 41 in the area with the heat generating part 25 formed, immediately below the ink ejecting nozzle 35, the heat generating part 25 is exposed.
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