| 摘要 |
PROBLEM TO BE SOLVED: To provide a scroll chuck which can be easily manufactured also capable of performing high accurate centering. SOLUTION: In a scroll chuck moving in a radial direction a plurality of pawl members 17 arranged with an equal space around a prescribed axial line 6 in accordance with rotation around the axial line 6 of a scroll member 10 having a spiral-shaped groove part 11 with the axial line 6 serving as the center, the pawl member 17 has a spherical body 21 fitted to the groove part 11 provided in the scroll member 10.
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