发明名称 Surface treatment composition and method for treating surface of substrate by using the same
摘要 A surface treatment composition containing a complexing agent as a metal deposition preventive in a liquid medium, in which the complexing agent is an ethylenediaminephenol derivative of the following general formula (1) or its salt: wherein X1 and X2 are hydroxyl groups; Y1 to Y8 are respectively independently a hydrogen atom, a hydroxyl group, a halogen atom, a carboxyl group, a phosphonic acid group, a sulfonic acid group, a carbonyl group, a nitro group, a nitroso group, an amino group, an imino group, a nitrilo group, a nitrile group, a thiocyanate group, a hydroxyamino group, a hydroxyimino group, or an alkyl or alkoxy group which may have a substituent, provided that at least one of Y1 to Y8 is not a hydrogen atom; Z1 to Z4 are respectively independently a hydrogen atom, a carboxyl group or a sulfonic acid group; and R1 to R4 are respectively independently a hydrogen atom or an alkyl group which may have a substituent.
申请公布号 US6143706(A) 申请公布日期 2000.11.07
申请号 US19980013066 申请日期 1998.01.26
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 MORINAGA, HITOSHI
分类号 C11D3/33;C11D3/34;C11D3/36;C23G1/14;H01L21/304;H01L21/306;(IPC1-7):C11D3/30 主分类号 C11D3/33
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