发明名称 |
Method for controlling the morphology of deposited silicon on a silicon dioxide substrate and semiconductor devices incorporating such deposited silicon |
摘要 |
A method for controlling the morphology of deposited silicon on a layer of silicon dioxide and semiconductor devices incorporating such deposited silicon are provided. The method comprises the steps of: providing a layer of silicon dioxide; implanting hydrogen ions into the layer of silicon dioxide by plasma source ion implantation; and forming a layer of polycrystalline silicon on the layer of silicon dioxide.
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申请公布号 |
US6143631(A) |
申请公布日期 |
2000.11.07 |
申请号 |
US19980072262 |
申请日期 |
1998.05.04 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
CHAPEK, DAVID L. |
分类号 |
H01L21/28;H01L21/30;H01L21/3115;H01L21/3205;H01L21/336;(IPC1-7):H01L21/265 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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