发明名称 MASK MATERIAL FOR EXPOSURE
摘要 <p>PROBLEM TO BE SOLVED: To obtain a mask material for exposure excellent in fine image reproducibility and capable of easily forming a mask for exposure. SOLUTION: The mask material has at least a silver halide emulsion layer and a physical developing nucleus layer on a glass substrate, has the physical developing nucleus layer between the glass substrate and the silver halide emulsion layer, forms a metal silver image having <=1μm thickness on the glass substrate by physical development and provides a maximum optical density of >=1.0 to the metal silver image. Preferably the thickness of the metal silver image is <=0.5μm, water-soluble gelatin does not substantially remain and a layer based on a metal oxide, preferably titanium dioxide is present between the glass substrate and the physical developing nucleus layer.</p>
申请公布号 JP2000310846(A) 申请公布日期 2000.11.07
申请号 JP19990119050 申请日期 1999.04.27
申请人 MITSUBISHI PAPER MILLS LTD 发明人 NAKAGAWA KUNIHIRO;KAWAI NOBUYUKI;HIGASHIYAMA MASATO
分类号 H01L21/027;G03C8/06;G03F1/56;(IPC1-7):G03F1/08 主分类号 H01L21/027
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