发明名称 |
MASK MATERIAL FOR EXPOSURE |
摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a mask material for exposure excellent in fine image reproducibility and capable of easily forming a mask for exposure. SOLUTION: The mask material has at least a silver halide emulsion layer and a physical developing nucleus layer on a glass substrate, has the physical developing nucleus layer between the glass substrate and the silver halide emulsion layer, forms a metal silver image having <=1μm thickness on the glass substrate by physical development and provides a maximum optical density of >=1.0 to the metal silver image. Preferably the thickness of the metal silver image is <=0.5μm, water-soluble gelatin does not substantially remain and a layer based on a metal oxide, preferably titanium dioxide is present between the glass substrate and the physical developing nucleus layer.</p> |
申请公布号 |
JP2000310846(A) |
申请公布日期 |
2000.11.07 |
申请号 |
JP19990119050 |
申请日期 |
1999.04.27 |
申请人 |
MITSUBISHI PAPER MILLS LTD |
发明人 |
NAKAGAWA KUNIHIRO;KAWAI NOBUYUKI;HIGASHIYAMA MASATO |
分类号 |
H01L21/027;G03C8/06;G03F1/56;(IPC1-7):G03F1/08 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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