| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device that can minimize such micro vibration of the polishing surface of the surface plate as results from rotation of the surface plate. SOLUTION: In order to give a mirror polish to material surfaces that need polishing, this polishing device comprises a surface plate rest 12 rotatably mounted on a bed 10, a surface plate installed on the surface plate rest 12 and provided on its top with abrasive cloth affixed thereto to form a polishing surface, and a pressurizing device for pressurize the polished material surface against the polishing surface of the surface plate. A static-pressure bearing 14 is disposed in a position that is between the surface plate rest 12 and the bed 10 where it holds the polishing surface of the surface plate flat, in order to support the surface plate rest 12 rotatably by virtue of injection oil from an injection nozzle 20 embedded in the bed 10. |
