| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system for an ultraviolet microscope using the wavelength of the deep ultraviolet region and capable of observing a bright image excellent in resolution and contrast by using a light source emitting light in a wavelength range from ultraviolet to infrared. SOLUTION: Light outgoing from the mercury lamp of a light source device 9 passes through a wavelength selection means 12, an illumination relay optical system 13, an optical path coupling means 14, a mirror 15, an image-formation lens 16, a wavelength selection means 17, a 1/4 wavelength plate 18, a half mirror 4, and an objective lens 5 and illuminates a sample. The light reflected on the sample traces the path backward, is guided from the means 14 to a relay optical system 19 and picked up by a TV camera 10. The means 12 satisfies a conditional expression (To.δ)/(Tm.Δ)>2 the center transmissivity of a selected wavelength region is To, the half value width isδnm, the average transmissivity in the wavelength region longer than 300 nm is Tm, and the felt sensitivity wavelength maintenance in the wavelength region longer than 300 nm in the TV camera 10 isΔnm.
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