摘要 |
<p>PROBLEM TO BE SOLVED: To increase an adsorbing speed and to make it last for long, by forming a getter layer on a backing surface at least having either Zr or Ti. SOLUTION: It is preferable that a getter layer at least contains a non- evaporating getter material and the getter layer at least contains Ti. The getter layer is preferably formed by laminating evaporated materials. The getter layer may be formed on a backing surface containing the non-evaporating getter material. In this case, the backing surface preferably contains Zr or Ti, and the getter layer at least contains Ti. Generally, the backing surface is irregular, and preferably porous. In addition, the backing surface is irregular, and the layer thickness of the getter layer is preferably smaller than roughness of irregularity of the backing surface. The backing surface is preferably formed by thermally spraying composites of the backing surface.</p> |