| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compsn. capable of efficiently removing an ITO film without practically corroding a metal of a metal mask, or the like, even in the case the ITO film lies on the metal by composing it of one or more kinds of acids of the group consisting of hydrochloric acid, phosphoric acid and carboxylic acid respectively of specified concns. as essential components and a surfactant. SOLUTION: This compsn. is composed of an aq. soln. contg. one or more kinds of acids selected from the group consisting of 0.5 to 15 wt.% hydrochloric acid, phosphoric acid and carboxylic acid by 0.5 to 15 wt.% and 0.01 to 5 wt.% surfactant. Moreover, it is composed of an aq. soln. contg. polyamine and/or the hydrochloride thereof by 0.1 to 5 wt.%. The carboxylic acid is the one of one or more kinds selected from the groups consisting of formic acid, acetic acid, lactic acid and oxalic acid, and the polyamine and/or the hydrochloride thereof is the one of one or more kinds of the groups consisting of polyacrylamine, polyallylamine and polyvinyl pyridine respectively having 10000 to 100000 weight average molecular weight.
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