| 摘要 |
A laser marking method and an apparatus thereof which realize stamp processing with a beautiful appearance and a high precision, without reducing the manufacturing efficiency. The laser marking method comprises a step of sequentially displaying divisional patterns each corresponding to one scanning line of a first deflector, a step of sequentially scanning the divisional patterns with a laser beam from a laser oscillator by the first deflector, and a step of moving a stamp position on a work surface for every one of scanning transmission beams respectively transmitted through the divisional patterns, in a direction perpendicular to a scanning direction, by a second deflector, thereby to synthesize and stamp the divisional patterns. The laser beam from the laser oscillator is divided into two or more sections in a direction perpendicular to an optical axis of the laser beam, and the two or more sections of the laser beam divided are partially superposed to equalize an energy distribution at least in one direction perpendicular to the scanning direction of the laser beam transmitted through the mask.
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