THERMOELECTRIC COOLING TEMPERATURE REGULATOR FOR SEMICONDUCTOR MANUFACTURING STEP FACILITY

摘要

PROBLEM TO BE SOLVED: To provide an automatic temperature regulator for maintaining a temperature in a semiconductor manufacturing step facility constant. SOLUTION: The thermoelectric cooling temperature regulator for a semiconductor manufacturing step facility comprises a heat exchanger for heat exchanging by one or above thermoelectric cooling elements 10, utilizing a Peltier effect for generating heat absorbing and heating phenomena by a flow of a current in the facility F having a chamber 30 capable of repeatedly performing predetermined processing steps, by incorporating a wafer 2 to continue a placing portion of the wafer 2 in the facility at a predetermined temperature. Accordingly, a scale of a clean room can be minimize by simply installing in the facility F to remarkably save a cost required to build the room. Thus, effects capable of suitably maintaining a temperature of the processing wafer 2 to remove a step causing defects and to improve productivity and yield are incorporated.