| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejector type vacuum chuck of high safety with a sucking condition maintainable of a workpiece for some time even in the case of stopping a compressor. SOLUTION: A check valve 3 is provided in a pipe communicating a sucker groove provided in a sucker surface with a suction port 2c of an ejector 2. A switching means 4 which supplied compressed air to either one of the ejector 2 or a reverse injection pipe P7 and can stop supply of compressed air to the other, is provided, and the reverse injection pipe P7 communicates with the sucker groove.
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