SIZING PROCESSING METHOD FOR GRAPHIC DATA WITH OPC PATTERN AND SIZING PROCESSING APPARATUS FOR GRAPHIC DATA WITH OPC PATTERN

摘要

PROBLEM TO BE SOLVED: To prevent the disappearance of fine OPC graphics by subjecting the freshly formed OPC graphics to reduction sizing or enlargement sizing at a first sizing value and the second polygon data obtained by removing the OPC graphics from first polygon data at a second sizing value, respectively. SOLUTION: A graphic data forming and processing section 130 freshly forms the OPC graphics for projecting parts or recessed parts in the position extracted by OPC part position extraction processing and forms the second polygon data in the state of removing the OPC graphics from the first polygon data. A sizing processing section 140 subjects the OPC graphics formed by the OPC graphic forming processing to the sizing processing at the first sizing value and the second polygon data at the second sizing value. A synthesis processing section 150 executes the synthesis processing to obtain the polygon data reduced or enlarged by a prescribed size from the first polygon data by synthesizing respective graphic data subjected to the sizing.