| 发明名称 |
Carrier head with a retaining ring for a chemical mechanical polishing system |
| 摘要 |
A carrier head for chemical mechanical polishing with a retaining ring having an inclined inner surface. The force of the edge of the substrate against the inclined surface causes a reactive force having a vertical component on the edge of the substrate. This vertical force can reduce the edge effect.
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| 申请公布号 |
US6143127(A) |
申请公布日期 |
2000.11.07 |
| 申请号 |
US19980079009 |
申请日期 |
1998.05.14 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PERLOV, ILYA;GANTVARG, EUGENE |
| 分类号 |
B24B37/04;B24B41/06;H01L21/304;(IPC1-7):B24B5/00;B24B29/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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