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发明名称
摘要
申请公布号
JP3105547(B2)
申请公布日期
2000.11.06
申请号
JP19900404457
申请日期
1990.12.20
申请人
发明人
分类号
H01L21/302;C23F4/02;H01L21/3205;H01L21/3213;H01L23/52;H05K3/06;(IPC1-7):H01L21/321;H01L21/306;H01L21/320
主分类号
H01L21/302
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代理人
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