发明名称 APPARATUS FOR FIXING ALIGNER BLOCK OF HANDLER
摘要 PURPOSE: An apparatus for fixing an aligner block of a handler is provided to stably load a device supplied to an aligner by preventing the error of the device generated when the aligner block is fixed. CONSTITUTION: An apparatus for fixing an aligner block of a handler comprises an aligner block, an aligner lower block, and an aligner block fixing device. The aligner lower block is installed at the lower portion of the aligner block. The aligner lower block has an insertion recess which is formed horizontally. The aligner block fixing device is inserted into the insertion recess formed in the aligner lower block. The aligner block fixing device is installed at the lower portion of the aligner block. The aligner fixing device comprises a cylinder, a first rod, a second rod, and a pair of base fixing blocks.
申请公布号 KR20000065292(A) 申请公布日期 2000.11.06
申请号 KR19990011403 申请日期 1999.04.01
申请人 MIRAE CORPORATION 发明人 LEE, DONG SEO
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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