| 摘要 |
PURPOSE: A method for producing a combined vacuum coating system is provided to be applied to a combined system only with a good point obtained from a single system and to keep an optimum state established in the combined coating system. CONSTITUTION: A combined vacuum coating system is divided into a chamber(10), a Z & rotation manipulator unit, a target holder unit(50), a heating element unit(40), radiation shield units(11,11a,103) and units(100,101,102) based on coating methods. Herein, sputtering source, evaporation source, thermal source, E-beam source, effusion cell, crucible and liner, ion-etch source and laser deposition source methods are used for the coating method of the combined coating vacuum system.
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