| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optical monitor which can measure optical characteristics of an optical thin film obtained by a film forming device with high precision right after the film formation and a film formation system accompanied by it. SOLUTION: The light of a light source LUM passes through a Y type optical fiber OPYF. One branching light OPYF-R has an optical path 1 for transmissivity measurement and the other OPYF-L has an optical path 2 for light source measurement. The optical paths 1 and 2 are connected to a shutter part MS and the light passing through one of the optical path is selected and supplied to an optical demultiplexer SP. An arithmetic processing part PC is able to detect and control the state of the shutter part MS and processes the data from the optical demultiplexer SP according to the selection state of the shutter part MS. The arithmetic processing part PC when measuring the quantity of light of the optical path 1 inputs as a correction data component the variation of the optical path 2, i.e., the light source LUM by directly monitoring and measuring it and applies it for the correction of the light quantity measurement of the optical path 1. |
