| 摘要 |
PROBLEM TO BE SOLVED: To make stably and accurately formable a gap determinable by the depth of a recess between optical parts and a sample by providing the recess at a part in contact with the sample of a prism and simply placing the optical parts on the sample. SOLUTION: A prism 121 made of silicon is brought into contact with the surface of a sample 111, incidence light 131 is applied at an angle of 45 degrees in an oblique lower direction, and emission light 132 is optically analyzed, thus analyzing the sample. On the upper surface where the prism 121 touches the sample 111, a recess 122 with a depth of 5μm is provided while leaving a periphery of 1 mm. When measurement light enters a gap of 5μm between the bottom surface of the recess and the surface of a sample, multiple reflection occurs and the interaction between light and the sample increases, and measurement sensitivity improves. The depth of the recess can be selected within a range of severalμm to several hundreds ofμm. Further, any incidence and emission angle of the prism can be measured and light preferably enters at an angle of 60-80 deg. form the sample surface to improve the sensitivity. |
