| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high resonance frequency while keeping a mechanical strength of a vibration part by utilizing a high order vibration mode. SOLUTION: A vibration section 10a of a piezoelectric vibrator 10 consisting of two layers or over of thin film piezoelectric bodies 1-n is configured by alternately laminating a plurality of the thin film piezoelectric bodies 1-n and a plurality of insulation thin films 12 in a way of each insulation thin film directed to outside. The thickness longitudinal vibration is used, where the high order vibration mode is stimulated with priority by applying a voltage of an opposite phase to adjacent piezoelectric bodies in a plurality of the thin film piezoelectric bodies 1-n.
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