| 摘要 |
PROBLEM TO BE SOLVED: To suppress amount of data to the minimum by unitarily managing all job files in a server, and in addition, to make an arbitrary parameter changes made in a specific stepper to be reflected in another stepper by giving such flexibility to the server that the server can designate an object to be managed. SOLUTION: In an aligner constituted by connecting an aligner management device (server) to an exposing device through a network, the exposing device informs the server of a parameter change, when the change is made and the server keeps and differentially manages the changed parameter sent from the exposing device. The differential management is performed only on, for example, the parameter designated from an operator.
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