| 摘要 |
<p>A method of producing a floating sphere type measuring device having a floatable sphere and electrodes surrounding the sphere, comprising the steps of forming a first sacrificing film on the surface of the sphere, forming electrode patterns consisting of a conductive film on the first sacrificing film, forming a second sacrificing film so as to cover the electrode patterns-formed first sacrificing film, forming groove patterns in the second sacrificing film to expose the electrode patterns, forming an insulating film for connection between a plurality of exposed electrode patterns, and removing the first and second sacrificing films.</p> |
