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发明名称
Verfahren und Vorrichtung zum Reinigen von Siliziumscheiben
摘要
申请公布号
DE59508757(D1)
申请公布日期
2000.11.02
申请号
DE19955008757
申请日期
1995.06.08
申请人
ASTEC HALBLEITERTECHNOLOGIE GMBH
发明人
KALTENBACH, KONRAD;STADLER, MAXIMILIAN DR.
分类号
B08B3/04;H01L21/302;(IPC1-7):H01L21/302
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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