| 摘要 |
PROBLEM TO BE SOLVED: To obtain the transfer tool of a film-shaped substrate that prevents the waste and the decrease in work efficiency on the conveyance of a film- shaped substrate, and can surely eliminate damages to the film-shaped substrate. SOLUTION: A transfer tool 1 of a film-shaped substrate has a tool body 16, that is used in a transfer path R of a film-shaped substrate 2 and places the film-shaped substrate 2. In this case, two holes 201 being formed on the film-shaped substrate 2 are inserted into two tapered pins 19a and 19b installed at the tool body 16, thus retaining the film-shaped substrate 2. |
