| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high cleanliness clean room wherein even when a fan filter unit is installed, thinned out, there is no residence in a thinned-out lower region with no residence of dust in a ceiling surface peripheral edge region. SOLUTION: A permeable member 38 possessing permeating property is disposed in a thinned-out opening section 37, and a part of air in a clean room 12 is returned to an attic space 24 through the permeable member 38, and further a bent member 68 is disposed to make round an abutment portion 66 between a ceiling surface 16 and a side wall section 64. Hereby, there is no dust residence in the thinned-out lower region and in the peripheral edge region of the ceiling surface 16, so that cleanliness in the clean room 12 is improved.
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